Scanning Probes Facility
Bruker AFM Dimension 3100
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Contact mode, tapping mode, magnetic force microscopy
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Measurements in fluid
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Optical microscope
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z range: 8 µm
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x/y scanning range: 100 µm x 100 µm
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x/y closed loop operation
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Maximum sample height ca. 2 cm
Keysight Technologies Nanoindenter G 200
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Continuous stiffness mode
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XP and DCM-1 heads
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Nanovision stage (AFM imaging with indenter)
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High temperature cell (up to 250°C)
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Optical microscope
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Lateral force sensors
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Maximum load 200 mN
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Load resolution 50 nN
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Depth resolution <0.01 nm
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Positioning accuracy 1 µm (with nanovision stage 2 nm)
VISITEC Large Chamber SEM
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Warm field emission gun
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Two SE detectors, quadrant BSE detector, EBSD, EDX, Everhart-Thornley detector
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Integrated servo-hydraulic testing machine with maximum testing force of 100 kN
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Heating equipment for mechanical testing up to 350 °C
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Chamber size 2 m³
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Samples up to 700 mm in diameter, 600 mm in height and 300 kg
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5 axes positioning system for electro-optical components and detectors